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Micro and Nanotechnology Laboratory
(Formerly the Microelectronics Laboratory)
I. Adesida, Director
127 Micro and Nanotechnology Laboratory, 208 N. Wright St., MC-249, Urbana, IL 61801-2355
217-333-3097 • http://www.micro.uiuc.edu
(Formerly the Microelectronics Laboratory)
I. Adesida, Director
127 Micro and Nanotechnology Laboratory, 208 N. Wright St., MC-249, Urbana, IL 61801-2355
217-333-3097 • http://www.micro.uiuc.edu
The Micro and Nanotechnology Laboratory,* a multidisciplinary research facility in the College of Engineering, houses advanced equipment to support research in photonics, microelectronics, nanotechnology, and biotechnology. The research activities that are facilitated by the laboratory can be divided into four areas:
•Optoelectronics and Photonic Systems
•Microelectronics for Wireless Communications
•Microelectromechanical Systems
•Nanobiosystems
The research programs of the Optoelectronics and Photonic Systems area are focused on the conceptualization, design, fabrication, and testing of microelectronic and optoelectronic devices, circuits, components, and systems for lightwave communications and optical interconnects.
The activities of the Microelectronics for Wireless Communications area include the design and fabrication of state-of-the-art, low-power RF and microwave monolithic integrated circuits (MMICs) and GHz analog-to-digital converters for advanced wireless communication systems and advanced digital radar systems.
The above two research areas are supported in the laboratory with extensive development of growth, characterization, and processing technologies for a broad range of III-V semiconductor materials, quantum wells, superlattices, and nanostructures. The III-V materials include compounds and alloys with bandgaps appropriate for UV detectors, visible emitters, near- and mid-infrared sources (LEDs, side-emitting lasers, and VCSELs), detectors, FETs, and HBTs.
The Microelectromechanical Systems (MEMS) area focuses on the development of micromachining methods for a variety of materials, such as silicon, gallium arsenide, and polymers, to enable applications in many interdisciplinary areas, including wireless communications, optoelectronics, and biomedical engineering.
The Nanobiosystems area focuses on utilizing the various technologies developed in materials, nanofabrication, devices, and MEMS to study and solve biological issues. Examples of research activities being carried out include biomolecular flow patterns in nanoscale channels, integration of lasers onto biochips for real-time fluorescence study of bioreactions, and implantation of active devices in cells to study cellular biochemistry.
The Micro and Nanotechnology Laboratory is one of the nation's largest and most sophisticated university-based facilities for semiconductor, nanotechnology, and biotechnology research. It contains more than 8,000 square feet of class 100 and class 1000 clean-room laboratory and state-of-the-art, ultra-high-speed optical and electrical device and circuit measurements. The laboratory has in the past housed various centers, including the NSF-funded Engineering Research Center for Compound Semiconductor Microelectronics and the DARPA-funded Center for Optoelectronic Science and Technology. It currently houses the DARPA-funded Center for Bio-Optoelectronic Sensors and Systems. The laboratory is a User Facility that is available for use by university and industrial personnel from across the nation.
*Formerly the Microelectronics Laboratory. Please note that all 2001 Summary of Engineering Research report documents use the name Microelectronics Laboratory to designate research conducted in this laboratory prior to the name change., and Nanobiosystems
The research programs of the Optoelectronics and Photonic Systems area are focused on the conceptualization, design, fabrication, and testing of microelectronic and optoelectronic devices, circuits, components, and systems for lightwave communications and optical interconnects.
The activities of the Microelectronics for Wireless Communications area include the design and fabrication of state-of-the-art, low-power RF and microwave monolithic integrated circuits (MMICs) and GHz analog-to-digital converters for advanced wireless communication systems and advanced digital radar systems.
The above two research areas are supported in the laboratory with extensive development of growth, characterization, and processing technologies for a broad range of III-V semiconductor materials, quantum wells, superlattices, and nanostructures. The III-V materials include compounds and alloys with bandgaps appropriate for UV detectors, visible emitters, near- and mid-infrared sources (LEDs, side-emitting lasers, and VCSELs), detectors, FETs, and HBTs.
The Microelectromechanical Systems (MEMS) area focuses on the development of micromachining methods for a variety of materials, such as silicon, gallium arsenide, and polymers, to enable applications in many interdisciplinary areas, including wireless communications, optoelectronics, and biomedical engineering.
The Nanobiosystems area focuses on utilizing the various technologies developed in materials, nanofabrication, devices, and MEMS to study and solve biological issues. Examples of research activities being carried out include biomolecular flow patterns in nanoscale channels, integration of lasers onto biochips for real-time fluorescence study of bioreactions, and implantation of active devices in cells to study cellular biochemistry.
The Micro and Nanotechnology Laboratory is one of the nation's largest and most sophisticated university-based facilities for semiconductor, nanotechnology, and biotechnology research. It contains more than 8,000 square feet of class 100 and class 1000 clean-room laboratory and state-of-the-art, ultra-high-speed optical and electrical device and circuit measurements. The laboratory has in the past housed various centers, including the NSF-funded Engineering Research Center for Compound Semiconductor Microelectronics and the DARPA-funded Center for Optoelectronic Science and Technology. It currently houses the DARPA-funded Center for Bio-Optoelectronic Sensors and Systems. The laboratory is a User Facility that is available for use by university and industrial personnel from across the nation.
*Formerly the Microelectronics Laboratory. Please note that all 2001 Summary of Engineering Research report documents use the name Microelectronics Laboratory to designate research conducted in this laboratory prior to the name change., and Nanobiosystems
The research programs of the Optoelectronics and Photonic Systems area are focused on the conceptualization, design, fabrication, and testing of microelectronic and optoelectronic devices, circuits, components, and systems for lightwave communications and optical interconnects.
The activities of the Microelectronics for Wireless Communications area include the design and fabrication of state-of-the-art, low-power RF and microwave monolithic integrated circuits (MMICs) and GHz analog-to-digital converters for advanced wireless communication systems and advanced digital radar systems.
The above two research areas are supported in the laboratory with extensive development of growth, characterization, and processing technologies for a broad range of III-V semiconductor materials, quantum wells, superlattices, and nanostructures. The III-V materials include compounds and alloys with bandgaps appropriate for UV detectors, visible emitters, near- and mid-infrared sources (LEDs, side-emitting lasers, and VCSELs), detectors, FETs, and HBTs.
The Microelectromechanical Systems (MEMS) area focuses on the development of micromachining methods for a variety of materials, such as silicon, gallium arsenide, and polymers, to enable applications in many interdisciplinary areas, including wireless communications, optoelectronics, and biomedical engineering.
The Nanobiosystems area focuses on utilizing the various technologies developed in materials, nanofabrication, devices, and MEMS to study and solve biological issues. Examples of research activities being carried out include biomolecular flow patterns in nanoscale channels, integration of lasers onto biochips for real-time fluorescence study of bioreactions, and implantation of active devices in cells to study cellular biochemistry.
The Micro and Nanotechnology Laboratory is one of the nation's largest and most sophisticated university-based facilities for semiconductor, nanotechnology, and biotechnology research. It contains more than 8,000 square feet of class 100 and class 1000 clean-room laboratory and state-of-the-art, ultra-high-speed optical and electrical device and circuit measurements. The laboratory has in the past housed various centers, including the NSF-funded Engineering Research Center for Compound Semiconductor Microelectronics and the DARPA-funded Center for Optoelectronic Science and Technology. It currently houses the DARPA-funded Center for Bio-Optoelectronic Sensors and Systems. The laboratory is a User Facility that is available for use by university and industrial personnel from across the nation.
*Formerly the Microelectronics Laboratory. Please note that all 2001 Summary of Engineering Research report documents use the name Microelectronics Laboratory to designate research conducted in this laboratory prior to the name change.
Faculty associated with the Micro and Nanotechnology Laboratory are listed below.
Biotechnology Center
H. Lewin
Department of Chemical Engineering
P. Kenis
D. Leckband
C. Zukoski
Department of Chemistry
P. Bohn
J. Moore
Department of Electrical and Computer Engineering
I. Adesida
J. Bernard
S. Bishop
S. Boppart
K. Y. Cheng
K. Choquette
S. L. Chuang
J. Coleman
G. Eden
M. Feng
C. Gardner
K. Hess
N. Holonyak, Jr.
K. C. Hsieh
K. Kim
M. Kushner
J. P. Leburton
C. Liu
J. Lyding
G. Papen
U. Ravaioli
E. Rosenbaum
J. Schutt-Aine
G. Timp
J. Tucker
A. Webb
B. Wheeler
Department of General Engineering
N. Aluru
Department of Materials Science and Engineering
J. Abelson
L. Allen
P. Braun
J. Weaver
G. Wong
Department of Mechanical and Industrial Engineering
T. Saif
M. Shannon
L. Phinney
Department of Nuclear, Plasma, and Radiological Engineering
G. Miley
Department of Physics
I. Bezryadin
D. Van Harlingen
A. Yazdani
- Micro and Nanotechnology Laboratory
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- Papers Presented at Conferences and Symposia
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