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Electrical and Computer Engineering

Tunneling Microscopy
^ Nanoelectronics-Low-Power, High-Performance Components and Circuits
J. W. Lyding,* K. Hess;* J. Moore* (Chem.); R. Martin,* H. Choi* (Physics)
U.S. Navy, ASUSG 98-152SG

This is a MURI program at the Beckman Institute with the goal of combining STM nanofabrication with atomistic simulations to develop novel nanoelectronic device structures on the atomic and molecular size scale. Techniques are being developed to fabricate and test these structures in situ in the UHV STM. This program also involves collaborations with Arizona State University, University of Notre Dame, and University of California, Berkeley, to explore new interconnect schemes for nanoelectronics and to interface nanoelectronic devices with conventional microelectronic circuits.

^ Nanoscale Interface Characterization by UHV STM Spectroscopy
J. W. Lyding,* L. Liu, J. Yu, J. Tolomei
Office of Naval Research, N00014-00-1-0234

This research is focused on atomic scale dopant mapping and the determination of the rms roughness and correlation lengths associated with oxide-silicon interfaces. The substitution of deuterium for hydrogen at oxide-silicon interfaces is also being studied. It has been determined that modern scaling trends that deuterium becomes increasingly effective at reducing hot carrier degradation in CMOS technology.

^ Protein Logic
J. W. Lyding;* N. Aluru* (Gen. Engr.); P. Braun* (Mat. Sci. & Engr.); S. Boppart;* M. Gruebele,* J. Moore* (Chem.); G. Timp
National Science Foundation, NIRT

This program seeks to integrate functional protein arrays with nanoscale CMOS on silicon. Natural and artificial ion channels are being utilized to interface between biology and silicon. Selective chemistry utilizing STM patterning is being used to fabricate the protein templates.


Summary of Engineering Research