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Electrical and Computer Engineering
Thin Films and Charged Particles
- A Novel Method for Preparing Thin Films and Nanoparticles by Using Charged Liquid Cluster Beams of Liquid-Mix Precursors
- Coating of Liquid Crystal Display Panel Components Using the Charged Liquid Cluster Beam Technique
- Electromagnetic Railgun Hydrogen-Pellet Accelerator for Magnetic Fusion Reactor Refueling
- Epitaxial Growth and Characterization of GaN-based Materials and Application to Electronic and Optical Devices by Plasma-assisted Molecular Beam Epitaxy
^ A Novel Method for Preparing Thin Films and Nanoparticles by Using Charged Liquid Cluster Beams of Liquid-Mix Precursors
K. Kim,* H. Choi,* Y. Yang
University of Illinois
A novel scheme using field-injection electrohydrodynamic spraying of liquid-mix precursors is investigated for development of a method for fabricating thin films of metals, semiconductors, superconductors, and insulators. The same technique is also suitable for fabricating nanoparticles from a variety of liquid precursors. Unique aspects of this new technique are that it is inherently capable of producing a uniform, charged fine spray of liquid precursors of controlled size, chemical composition, and stoichiometry, and that the energy of the spray can be controlled, allowing for fabrication of high-quality films and uniform nanoparticles.
^ Coating of Liquid Crystal Display Panel Components Using the Charged Liquid Cluster Beam Technique
K. Kim,* H. Choi,* S. H. Rhee,
LG. Philips LCD
(In collaboration with Beckman Institute for Advanced Science and Technology)
This work focuses on extensive utilization of the CLCB technique developed by this research group for deposition of films needed for the manufacture and development of high-performance LDCs. In particular, the work makes use of the unique capabilities of the CLCB technique to produce high-quality films of controlled chemical compositions and stoichiometries that are needed for various key LCD components, including metallic semiconducting and insulating films. These films are characterized and evaluated using the microanalysis facilities at the University of Illinois.
^ Electromagnetic Railgun Hydrogen-Pellet Accelerator for Magnetic Fusion Reactor Refueling
K. Kim,* H. Fan
U.S. Department of Energy, DE-FG02-84ER52111
Feasibility of an electromagnetic railgun as a high-velocity (~10 km/s) hydrogen pellet injector for refueling magnetic fusion reactors is investigated both experimentally and theoretically. A variety of advanced railgun configurations are considered, especially those which rely on magnetic propulsion of the pellet by a plasma-arc armature and which do not require a fuse to effect the system operation. The principal diagnostics used are laser interferometry, optical spectroscopy, streak camera, and magnetic probes. A CAMAC system is employed for data acquisition and processing. Using the present acceleration scheme, a solid hydrogen pellet velocity in the range of 3.3 km/s has been demonstrated.
^ Epitaxial Growth and Characterization of GaN-based Materials and Application to Electronic and Optical Devices by Plasma-assisted Molecular Beam Epitaxy
K. Kim,* S. H. Rhee, C. W. Park
Concorde Diversified, Inc.
The objective of this work is to grow device-quality GaN-based films for fabrication of short-wavelength optical devices and high-speed, high-power electronic devices. The growth technique used is the plasma-assisted molecular beam epitaxy that employs an atomic nitrogen beam from an rf-discharge nitrogen plasma and a Ga source beam. The growth system is one designed and fabricated at the University of Illinois, and the nitrogen plasma source is uniquely capable of producing contamination-free plasmas. The films are characterized using a variety of microanalysis techniques including RHEED, XRD, SEM, and TEM.
